- Principals of Operations:
The abatement of Silane, other pyrophoric, corrosive, and toxic gases. Vacuum pump delivers reacted and un-reacted gases to the E.DOC-SC via exhaust piping. Upon entrance into the E.DOC-SC the gases are vigorously mixed in with ambient air in the Dynamic Oxidation Chamber. Air mixing is accomplished by utilizing the facility exhaust to draw ambient air through the inlet tube resulting in complete oxidation of the pyrophoric gas. A constant airflow eliminates the potential for gas pocketing or gas accumulation. Two (2) water spray nozzles are continuously spraying; the spray will effectively treat corrosive and other water-soluble gases and collect small airborne particulates.
- Benefits:
- Central cleaning mechanism
- Low down time
- Low capital & operating costs
- High level of safety
- Eliminates solids & corrosives in ductwork
- Minimal water usage
- No flammable gas for oxidation
- Features:
- Up to four process inlets
- Connectivity to process tool
- Airflow & water flow interlock
- UL listed components
- CE Certification
- Teflon coated stainless steel construction
- Utilities:
- 120/240 VAC 50-60Hz 2 amp electrical
- 20 – 60 CFM ambient air for process
- 75 – 100 CFM for cabinet exhaust
- 1 – 3 gpm, water
- 50 psi CDA or N2
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Gartman Technical Services