Silane Experiment

About Us
  • Pure Air Systems and Ebara Technologies, Inc Join Forces
February 1, 2005 - Ebara Technologies, Inc (ETI) signed agreement to become the sales and service representative for Pure Air Systems (PAS) for North America, Asia, and Europe.
  • PAS Company Background:
  • Involved with semiconductor mfg. since the late 70’s
  • Dynamic Oxidation created in 1991
  • Intellectual property protection granted in 1993
  • Issued license to build first device in 1994
  • Created PAS team in 1999
  • Developed scrubber unit in 2002
  • Developed thermal unit 2003
  • Focus on continuous R&D
  • Shiban Patents   (January 8, 2009)
Title Patent#
Pyrophoric gas neutralization chamber 5,271,908
Apparatus for mixing hazardous gas with an airflow 5,353,829
Hazardous gas mixing apparatus with rake for dislodging conduit deposits 5,699,826
Hazardous gas precipitator 6,030,584
Apparatus for oxidizing and removing matter from a hazardous gas flow 6,030,585
Method for reacting pyrophoric gas 6,084,148
Apparatus for treating pyrophoric gases 6,315,960
Arm & Hand Exercising Device 6,312,360
Combined Chemical Agent and Dynamic Oxidation Treatment of Hazardous Gas 10/750,902
Hazardous Gas Abatement System UK2425973